Fast SFS and FS2 thermal mass flow sensors

Air flow meters in ventilators are used to control the airflow, which is an important factor. Adults, for example, have different breathing volumes than younger persons, including children. As an alternative, temperature sensors have been used in ventilators to perform a simple air flow measurement, but they have a relatively large thermal mass. An IST flow sensor enables the possibility to have a better and more accurate adjustment through a higher sensor sensitivity, which results in better user experience while reducing the occurrence of drying out the patient’s nose, nose bleeding over time or even a lung injury from overventilation. Considering a possible breathing cycle between 300 ms to 3 seconds, the faster response time on our SFS flow sensors down to a T63 of 5 ms, allows one to perform a detailed breathing profile while opening the possibility to detect very fine and subtle breathing disorders. Both sensors, the SFS and the FS2, are suitable to detect inhalation and exhalation with a single sensor, through a clear flow direction detection.

Choose the right material
An inline flow sensor can be applied to monitor the flow through a cannula or mask and can be used to control the oxygen feedback loop. A simple and low-cost implementation was in mind during the development of the FS2 thermal mass flow sensor. While the SFS is made of silicon substrates, the FS2 is made of ceramic and glass which are inert, even if used in direct contact with 100% oxygen.

Other sensors and materials, FS7 and MFS02
During the development of the FS7, a simple implementation in combination with a robust and versatile material was achieved. The FS7 is also made of ceramic and glass (just like the FS2), however comes with only two resistors, which again allows an even simpler CTA (constant temperature anemometer) configuration when performing a flow measurement. For specialized applications, our MFS02 is made from polyimide and glass sensor construction materials.

Most modern ventilators can deliver flow rates between 60 and 120 L/min (which is 7 m/s with a 19 mm ID tube at peak flow). All sensor chips, the SFS, FS2, FS7 and the MFS02, cover a wide dynamic range and flow rates beyond the required flow volumes for a respirator application.

Über die Innovative Sensor Technology IST AG

Innovative Sensor Technology IST AG is one of the global leaders in micro system technology, services and solutions for industrial measurement applications. The company employs approx. 400 personnel across the globe.

IST AG is a manufacturer and partner for physical, chemical and biological sensors. Its product range contains thin-film platinum and nickel RTD temperature sensors, capacitive humidity sensors, thermal mass flow sensors, conductivity and biosensors. IST AG also manufactures a broad portfolio of calibrated humidity modules. Additionally, a highly qualified technical team offers consulting, development and production of challenging customer requests in the field of micro system technology.

The wide product range is the choice of many renowned end customers and OEMs in their fields. As a result, IST AG sensors are found in measuring instruments for various applications, such as HVAC, automation, appliance, medical, test and measurement, aerospace, bio measurement and process control and many more.

Founded in 1991, Innovative Sensor Technology is headquartered in Ebnat-Kappel, Switzerland in the mountain region of Toggenburg. In 2005, Innovative Sensor Technology became part of the Endress+Hauser Group, headquartered in Reinach, Switzerland. The Endress+Hauser Group is among the global leaders in measuring instruments, services and solutions for industrial process engineering.

For further information, please visit

Firmenkontakt und Herausgeber der Meldung:

Innovative Sensor Technology IST AG
Stegrütistrasse 14
CH9642 Ebnat-Kappel
Telefon: +41 (71) 99201-00

Caroline Kooijmans-Schwarz
Telefon: +49 (719) 920100
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