The new SCANIUS-LINE combines long travel with the accuracy of a piezo drive in a compact design. Fast – moving speed up to 160 mm/s Precise – resolution down to 40 nm Flexible – travel range of up to 150 […]
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The new SCANIUS-LINE combines long travel with the accuracy of a piezo drive in a compact design. Fast – moving speed up to 160 mm/s Precise – resolution down to 40 nm Flexible – travel range of up to 150 […]